Introduction to Microengineering
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| Audience/Grade: | College Freshman-Graduate |
| Discipline(s): |
General Engineering, Engineering Science MEMS/NEMS |
| Special Topic(s): | |
| Learning Resource Type: |
Reference - General |
| Media Type: |
Unknown |
| Author(s): |
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| Description: | This resource provides an introduction to micro-scale engineering and gives a good overview of micromachining, MEMS sensors and actuators, and packaging issues. The material presented here is detailed more in the author's textbook "Microengineering, MEMS, and Interfacing." |
| Rating: | No Rating |
| Related Resources | |
| Version Info | |
| Publication Date: | July 2006 |
| Platform/Format: |
WWW |
| Cost: |
Free |
| Download URL: | http://www-inst.eecs.berkeley.edu/~ee143/fa05/handouts/Introducti |
| Metadata: |
IEEE LOM Record |
| Collection: |
NEEDS
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