MEMS Suspension Design: Curve Flexure
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| Audience/Grade: | College Freshman-Graduate |
| Discipline(s): |
MEMS/NEMS Mechanical Engineering |
| Special Topic(s): | |
| Learning Resource Type: |
Teaching - Case Study |
| Author(s): |
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| Description: | MEMS Geometric Properties: Multiple 180 degree-arched beams attached to center mass and outer ring to give a turbine geometry. Height is greater than width to induce flexing in rotational direction only. Performance Properties: Mainly used for gyroscopes and other rotational suspension devices. Curved beams are designed to handle stresses in a rotational load environment. |
| Rating: | No Rating |
| Related Resources | |
| Version Info | |
| Publication Date: | May 2004 |
| Platform/Format: |
WWW |
| Download Size: |
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| Cost: |
Free |
| Download URL: | http://best.me.berkeley.edu/~ccobb/mems/index.html |
| System Requirements: |
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| Installation Notes: |
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| Metadata: |
IEEE LOM Record |
| Collection: |
NEEDS
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