MEMS Suspension Design: Double Flexure
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| Audience/Grade: | College Freshman-Graduate |
| Discipline(s): |
MEMS/NEMS Mechanical Engineering |
| Special Topic(s): | |
| Learning Resource Type: |
Teaching - Case Study |
| Author(s): |
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| Description: | MEMS Geometric Properties: Two single linear beams clamped to each corner of the mass and anchored at end of structure boundary. Performance Properties: Stiff nonlinear spring constant due to extensional axial stress. Minimum stress relative to its perpendicular is on the sensitive axis to achieve one directional movement. Length can be half of a single linear flexure to achieve same spring constant since two single beams are used. Stress concentration at anchor points are about half of single flexure. |
| Rating: | No Rating |
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| Version Info | |
| Publication Date: | May 2004 |
| Platform/Format: |
WWW |
| Download Size: |
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| Cost: |
Free |
| Download URL: | http://best.me.berkeley.edu/~ccobb/mems/index.html |
| System Requirements: |
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| Installation Notes: |
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| Metadata: |
IEEE LOM Record |
| Collection: |
NEEDS
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