MEMS Suspension Design: Serpentine Flexure
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| Audience/Grade: | College Freshman-Graduate |
| Discipline(s): |
MEMS/NEMS Mechanical Engineering |
| Special Topic(s): | |
| Learning Resource Type: |
Teaching - Case Study |
| Author(s): |
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| Description: | MEMS Geometric Properties: Linear beam segments joined perpendicular to form snake-like meander loops. Ends are clamped to center of mass and anchored at the end of the structure boundary. Performance Properties: Individual compact meander springs that have adjusted width to give the desired stiffness ratio. Residual and axial stress are relieved through bending of the meanders. Meanders are repeated in loops to reduce amount of peak stress at stress concentration points. |
| Rating: | No Rating |
| Related Resources | |
| Version Info | |
| Publication Date: | May 2004 |
| Platform/Format: |
WWW |
| Download Size: |
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| Cost: |
Free |
| Download URL: | http://best.me.berkeley.edu/~ccobb/mems/index.html |
| System Requirements: |
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| Installation Notes: |
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| Metadata: |
IEEE LOM Record |
| Collection: |
NEEDS
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