MEMS Suspension Design: Folded Flexure
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| Audience/Grade: | College Freshman-Graduate |
| Discipline(s): |
MEMS/NEMS Mechanical Engineering |
| Special Topic(s): | |
| Learning Resource Type: |
Teaching - Case Study |
| Author(s): |
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| Description: | MEMS Geometric Properties: Two single linear beams clamped to a single anchor and rigid truss which is joined by two outer single linear beams that are clamped to each corner of the center mass.This is considered an innerfold, continuous truss flexure. Performance Properties: Reduces axial stress components while allowing the flexure to expand or contract in all directions. The rigid truss at the end gives greater stiffness in one direction over the other. |
| Rating: | No Rating |
| Related Resources | |
| Version Info | |
| Publication Date: | May 2004 |
| Platform/Format: |
WWW |
| Download Size: |
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| Cost: |
Free |
| Download URL: | http://best.me.berkeley.edu/~ccobb/mems/index.html |
| System Requirements: |
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| Installation Notes: |
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| Metadata: |
IEEE LOM Record |
| Collection: |
NEEDS
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