MEMS Suspension Design: Crab Leg Flexure
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| Audience/Grade: | College Freshman-Graduate |
| Discipline(s): |
MEMS/NEMS Mechanical Engineering |
| Special Topic(s): | |
| Learning Resource Type: |
Teaching - Case Study |
| Author(s): |
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| Description: | MEMS Geometric Properties: Linear beams clamped to each corner of the mass and anchored perpendicular to linear beam with a crab-leg geometry. Performance Properties: Same as single flexure except the perpendicular section is designed to minimize peak stress while also reducing stiffness in the undesired direction. Peak stress is reduced since an extra nodal concentration point is designed in beam geometry, giving three concentration points. |
| Rating: | No Rating |
| Related Resources | |
| Version Info | |
| Publication Date: | May 2004 |
| Platform/Format: |
WWW |
| Download Size: |
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| Cost: |
Free |
| Download URL: | http://best.me.berkeley.edu/~ccobb/mems/index.html |
| System Requirements: |
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| Installation Notes: |
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| Metadata: |
IEEE LOM Record |
| Collection: |
NEEDS
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