MEMS Suspension Design: Single Flexure
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| Audience/Grade: | College Freshman-Graduate |
| Discipline(s): |
MEMS/NEMS Mechanical Engineering |
| Special Topic(s): | |
| Learning Resource Type: |
Teaching - Case Study |
| Author(s): |
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| Description: | MEMS Geometric Properties: Single linear beam clamped to center of mass and anchored at end of structure boundary. Performance Properties: Very stiff nonlinear spring constant due to extensional axial stress. Minimum stress relative to its perpendicular is on the sensitive axis to achieve one directional movement. Concentrated stress at anchored points. |
| Rating: | No Rating |
| Related Resources | |
| Version Info | |
| Publication Date: | May 2004 |
| Platform/Format: |
WWW |
| Download Size: |
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| Cost: |
Free |
| Download URL: | http://best.me.berkeley.edu/~ccobb/mems/index.html |
| System Requirements: |
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| Installation Notes: |
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| Metadata: |
IEEE LOM Record |
| Collection: |
NEEDS
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