MicroElectroMechanical Systems (MEMS)
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| Audience/Grade: | College Freshman-Graduate |
| Discipline(s): |
Engineering MEMS/NEMS |
| Special Topic(s): | |
| Learning Resource Type: |
Reference - General |
| Author(s): |
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| Description: | Presented here is an introduction to MEMS. The historical background of MEMS and fabrication technologies used to manufacture MEMS devices are detailed. MEMS design examples and applications are also discussed. |
| Rating: | No Rating |
| Related Resources | |
| Version Info | |
| Publication Date: | August 2006 |
| Platform/Format: |
WWW |
| Download Size: |
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| Cost: |
Unknown |
| Download URL: | http://www.csa.com/discoveryguides/mems/overview.php |
| System Requirements: |
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| Installation Notes: |
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| Copyright and Use Restrictions: |
Copyright 2001, All Rights Reserved, CSA |
| Metadata: |
IEEE LOM Record |
| Collection: |
NEEDS
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